Plasma Asher/Stripper
By combining powerful plasma molecular irradiation with a heater chuck, it removes organic substances that are difficult to eliminate with a standard plasma cleaner.
Features ● High output density downstream plasma treatment ● Heater stage maximum temperature 250℃ ● Control of various gas atmospheres using MFC (up to 4 systems) ● Efficient and low-heat treatment achieved with low-frequency 40kHz plasma power supply (CV200RFS) ● Strip rate CV200RFS: up to 7000Å/min EcoClean: 1.5 to 10μm/min
- Company：ハイソル
- Price：Other
